Granted Patent
Utility
US 6,099,643 · App. 08/993,284
Apparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment section
Inventors:
Masami Ohtani, Minobu Matsunaga, Tutomu Ueyama, Ryuji Kitakado, Kaoru Aoki
Patented Case
View Patent ↗
Granted: Aug 8, 2000
Filed: Dec 18, 1997
Inventors
Masami Ohtani
Minobu Matsunaga
Tutomu Ueyama
Ryuji Kitakado
Kaoru Aoki
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.