Granted Patent
Utility
US 6,099,686 · App. 08/504,664
Wet processing system
Inventor:
Hiroyuki Sugiuti
Patented Case
View Patent ↗
Granted: Aug 8, 2000
Filed: Jul 20, 1995
Inventor
Hiroyuki Sugiuti
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.