Granted Patent
Utility
US 6,100,015 · App. 09/027,736
Resist pattern forming method
Inventor:
Mitsuharu Yamana
Patented Case
View Patent ↗
Granted: Aug 8, 2000
Filed: Feb 23, 1998
Inventor
Mitsuharu Yamana
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.