Granted Patent
Utility
US 6,100,587 · App. 09/383,753
Silicon carbide barrier layers for porous low dielectric constant materials
Inventors:
Sailesh Mansinh Merchant, Sudhanshu Misra, Pradip K. Roy
Patented Case
View Patent ↗
Granted: Aug 8, 2000
Filed: Aug 26, 1999
Inventors
Sailesh Mansinh Merchant
Sudhanshu Misra
Pradip K. Roy
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.