Granted Patent
Utility
US 6,100,709 · App. 09/087,753
Silicon wafer testing rig and a method for testing a silicon wafer wherein the silicon wafer is bent into a dome shape
Inventors:
Thomas Marieb, Krishna Seshan, Donald L. Scharfetter
Patented Case
View Patent ↗
Granted: Aug 8, 2000
Filed: May 29, 1998
Inventors
Thomas Marieb
Krishna Seshan
Donald L. Scharfetter
Assignee (at issue)
Intel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.