Granted Patent
Utility
US 6,102,113 · App. 08/931,135
Temperature control of individual tools in a cluster tool system
Inventor:
Kenneth W. Cowans
Patented Case
View Patent ↗
Granted: Aug 15, 2000
Filed: Sep 16, 1997
Inventor
Kenneth W. Cowans
Assignee (at issue)
B/E AEROSPACE, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.