Granted Patent
Utility
US 6,109,113 · App. 09/096,130
Silicon micromachined capacitive pressure sensor and method of manufacture
Inventors:
Abhijeet V. Chavan, Kensall D. Wise
Patented Case
View Patent ↗
Granted: Aug 29, 2000
Filed: Jun 11, 1998
Inventors
Abhijeet V. Chavan
Kensall D. Wise
Assignees (at issue)
DELCO ELECTRONICS CORPORATION
THE REGENTS OF THE UNIVERSITY OF MICHIGAN
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.