Granted Patent
Utility
US 6,110,285 · App. 09/060,293
Vertical wafer boat
Inventors:
Atsuo Kitazawa, Hiroyuki Homma, Shuichi Takeda
Patented Case
View Patent ↗
Granted: Aug 29, 2000
Filed: Apr 15, 1998
Inventors
Atsuo Kitazawa
Hiroyuki Homma
Shuichi Takeda
Assignee (at issue)
Toshiba Ceramics Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.