Granted Patent
Utility
US 6,113,702 · App. 08/923,241
Wafer support system
Inventors:
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd, Loren Jacobs, Frank B. M. Van Bilsen, Matthew G. Goodman, Hartmann Glenn, Jason Layton
Patented Case
View Patent ↗
Granted: Sep 5, 2000
Filed: Sep 4, 1997
Inventors
Michael Halpin
Mark Hawkins
Derrick W. Foster
Robert Vyne
John F. Wengert
Cornelius A. van der Jeugd
Loren Jacobs
Frank B. M. Van Bilsen
Matthew G. Goodman
Hartmann Glenn
Jason Layton
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.