Granted Patent
Utility
US 6,118,577 · App. 09/130,224
Diffractive element in extreme-UV lithography condenser
Inventors:
William C. Sweatt, Avijit K. Ray-Chaudhurl
Patented Case
View Patent ↗
Granted: Sep 12, 2000
Filed: Aug 6, 1998
Inventors
William C. Sweatt
Avijit K. Ray-Chaudhurl
Assignee (at issue)
EUV, L.L.C.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.