Granted Patent
Utility
US 6,120,952 · App. 09/164,786
Methods of reducing proximity effects in lithographic processes
Inventors:
Christophe Pierrat, James Burdorf, William Baggenstoss, William A. Stanton
Patented Case
View Patent ↗
Granted: Sep 19, 2000
Filed: Oct 1, 1998
Inventors
Christophe Pierrat
James Burdorf
William Baggenstoss
William A. Stanton
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.