Granted Patent
Utility
US 6,126,752 · App. 08/947,712
Semiconductor device having capacitor and manufacturing apparatus thereof
Inventors:
Eiji Fujii, Yasuhiro Shimada, Yasuhiro Uemoto, Shinitirou Hayashi, Tooru Nasu, Koichi Arita, Atsuo Inoue, Akihiro Matsuda, Masaki Kibe, Tatsuo Ootsuki
Patented Case
View Patent ↗
Granted: Oct 3, 2000
Filed: Oct 9, 1997
Inventors
Eiji Fujii
Yasuhiro Shimada
Yasuhiro Uemoto
Shinitirou Hayashi
Tooru Nasu
Koichi Arita
Atsuo Inoue
Akihiro Matsuda
Masaki Kibe
Tatsuo Ootsuki
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.