IP Library › Granted Patent US 6,129,787
Granted Patent Utility
US 6,129,787 · App. 09/212,389

Semiconductor silicon wafer, semiconductor silicon wafer fabrication method and annealing equipment

Inventors: Naoshi Adachi, Masakazu Sano, Shinsuke Sadamitsu, Tsuyoshi Kubota
Patented Case View Patent ↗
Granted: Oct 10, 2000 Filed: Dec 16, 1998
Inventors
Naoshi Adachi
Masakazu Sano
Shinsuke Sadamitsu
Tsuyoshi Kubota
Assignee (at issue)
SUMITOMO METAL INDUSTRIES, LTD.

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Quick Facts
Patent No.
US 6,129,787
App. No.
09/212,389
Filed
1998-12-16
Granted
2000-10-10
Kind
A