IP Library › Granted Patent US 6,130,165
Granted Patent Utility
US 6,130,165 · App. 08/997,499

Autoaligned etching process for realizing word lines in memory devices integrated semiconductor substrates

Inventors: Emilio Camerlenghi, Elio Colabella, Luca Pividori, Adriana Rebora
Patented Case View Patent ↗
Granted: Oct 10, 2000 Filed: Dec 23, 1997
Inventors
Emilio Camerlenghi
Elio Colabella
Luca Pividori
Adriana Rebora
Assignee (at issue)
STMICROELECTRONICS S.r.l.

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Quick Facts
Patent No.
US 6,130,165
App. No.
08/997,499
Filed
1997-12-23
Granted
2000-10-10
Kind
A