Granted Patent
Utility
US 6,131,589 · App. 09/247,106
Accurate positioning of a wafer
Inventors:
Michael Vogtmann, Terry L. Lentz
Patented Case
View Patent ↗
Granted: Oct 17, 2000
Filed: Feb 9, 1999
Inventors
Michael Vogtmann
Terry L. Lentz
Assignee (at issue)
Strasbaugh
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.