Granted Patent
Utility
US 6,132,081 · App. 09/220,987
Method for calibrating optical sensor used to measure the temperature of a substrate during rapid thermal process
Inventor:
Jae-Won Han
Patented Case
View Patent ↗
Granted: Oct 17, 2000
Filed: Dec 23, 1998
Inventor
Jae-Won Han
Assignees (at issue)
Amkor Technology, Inc.
Anam Semiconductor
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.