Granted Patent
Utility
US 6,132,519 · App. 08/991,409
Vapor deposition apparatus and vapor deposition method
Inventors:
Tadashi Ohashi, Katuhiro Chaki, Ping Xin, Tatsuo Fujii, Katsuyuki Iwata, Shinichi Mitani, Takaaki Honda
Patented Case
View Patent ↗
Granted: Oct 17, 2000
Filed: Dec 16, 1997
Inventors
Tadashi Ohashi
Katuhiro Chaki
Ping Xin
Tatsuo Fujii
Katsuyuki Iwata
Shinichi Mitani
Takaaki Honda
Assignees (at issue)
Toshiba Ceramics Co., Ltd.
Toshiba Kikai Kabushiki Kaisha
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.