Granted Patent
Utility
US 6,132,592 · App. 09/281,475
Method of etching non-doped polysilicon
Inventors:
Shinya Yamasaki, Hidemitsu Aoki, Yasushi Sasaki
Patented Case
View Patent ↗
Granted: Oct 17, 2000
Filed: Mar 30, 1999
Inventors
Shinya Yamasaki
Hidemitsu Aoki
Yasushi Sasaki
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.