Granted Patent
Utility
US 6,132,637 · App. 09/071,566
Composition and method for polishing a composite of silica and silicon nitride
Inventors:
Sharath Hosali, Anantha R. Sethuraman, Jiun-Fang Wang, Lee Melbourne Cook, Michael R. Oliver
Patented Case
View Patent ↗
Granted: Oct 17, 2000
Filed: May 1, 1998
Inventors
Sharath Hosali
Anantha R. Sethuraman
Jiun-Fang Wang
Lee Melbourne Cook
Michael R. Oliver
Assignee (at issue)
Rodel Holdings, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.