Granted Patent
Utility
US 6,132,813 · App. 08/989,051
High density plasma surface modification for improving antiwetting properties
Inventors:
Pei C. Chen, Richard Hsiao, Son V. Nguyen, Andrew C. Ting
Patented Case
View Patent ↗
Granted: Oct 17, 2000
Filed: Dec 11, 1997
Inventors
Pei C. Chen
Richard Hsiao
Son V. Nguyen
Andrew C. Ting
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.