Granted Patent
Utility
US 6,132,814 · App. 08/856,888
Method for curing spin-on-glass film utilizing electron beam radiation
Inventors:
William R. Livesay, Matthew Ross, Anthony L. Rubiales
Patented Case
View Patent ↗
Granted: Oct 17, 2000
Filed: May 14, 1997
Inventors
William R. Livesay
Matthew Ross
Anthony L. Rubiales
Assignee (at issue)
Electron Vision Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.