Granted Patent
Utility
US 6,135,698 · App. 09/346,166
Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications
Inventors:
Anthony C. Bonora, Edward J. Cortez, J. Mark DiPaola, Robert Netsch
Patented Case
View Patent ↗
Granted: Oct 24, 2000
Filed: Jul 1, 1999
Inventors
Anthony C. Bonora
Edward J. Cortez
J. Mark DiPaola
Robert Netsch
Assignee (at issue)
Asyst Technologies L.L.C.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.