Granted Patent
Utility
US 6,136,166 · App. 09/049,222
Apparatus for producing a uniform magnetic field over a large surface area of a wafer
Inventors:
Yong Shen, Tai Min, Yiming Huai
Patented Case
View Patent ↗
Granted: Oct 24, 2000
Filed: Mar 27, 1998
Inventors
Yong Shen
Tai Min
Yiming Huai
Assignee (at issue)
Read Rite Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.