Granted Patent
Utility
US 6,136,614 · App. 09/034,967
Apparatus and method for manufacturing integrated circuit devices
Inventor:
Kevin K. Funk
Patented Case
View Patent ↗
Granted: Oct 24, 2000
Filed: Mar 4, 1998
Inventor
Kevin K. Funk
Assignee (at issue)
Agilent Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.