Granted Patent
Utility
US 6,136,631 · App. 09/195,935
Method for producing a microelectronic integrated cantilever
Inventors:
Karlheinz Mueller, Stefan Kolb
Patented Case
View Patent ↗
Granted: Oct 24, 2000
Filed: Nov 19, 1998
Inventors
Karlheinz Mueller
Stefan Kolb
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.