Granted Patent
Utility
US 6,136,699 · App. 09/164,494
Method of manufacturing semiconductor device using phase transition
Inventor:
Ken Inoue
Patented Case
View Patent ↗
Granted: Oct 24, 2000
Filed: Oct 1, 1998
Inventor
Ken Inoue
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.