Granted Patent
Utility
US 6,136,709 · App. 09/413,265
Metal line deposition process
Inventors:
Sven Schmidbauer, Stefan Weber, Peter Weigand, Larry Clevenger, Roy Iggulden
Patented Case
View Patent ↗
Granted: Oct 24, 2000
Filed: Oct 6, 1999
Inventors
Sven Schmidbauer
Stefan Weber
Peter Weigand
Larry Clevenger
Roy Iggulden
Assignees (at issue)
Infineon Technologies North America Corp.
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.