Granted Patent
Utility
US 6,136,711 · App. 09/086,659
Polishing composition including an inhibitor of tungsten etching
Inventors:
Steven Grumbine, Christopher C. Streinz, Eric W. G. Hoglund
Patented Case
View Patent ↗
Granted: Oct 24, 2000
Filed: May 29, 1998
Inventors
Steven Grumbine
Christopher C. Streinz
Eric W. G. Hoglund
Assignee (at issue)
Cabot Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.