Granted Patent
Utility
US 6,136,724 · App. 09/025,612
Multiple stage wet processing chamber
Inventors:
Eric T. Hansen, William Becia, Thomas Ives, Victor Mimken, Randy Mark Hall, Tom Krawzak
Patented Case
View Patent ↗
Granted: Oct 24, 2000
Filed: Feb 18, 1998
Inventors
Eric T. Hansen
William Becia
Thomas Ives
Victor Mimken
Randy Mark Hall
Tom Krawzak
Assignee (at issue)
SCP Global Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.