Granted Patent
Utility
US 6,137,178 · App. 09/099,093
Semiconductor metalization system and method
Inventor:
Young Jin Park
Patented Case
View Patent ↗
Granted: Oct 24, 2000
Filed: Jun 17, 1998
Inventor
Young Jin Park
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.