Granted Patent
Utility
US 6,137,821 · App. 09/217,340
Durable etalon based output coupler
Inventor:
Alexander I. Ershov
Patented Case
View Patent ↗
Granted: Oct 24, 2000
Filed: Dec 21, 1998
Inventor
Alexander I. Ershov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.