IP Library Granted Patent US 6,139,969
Granted Patent Utility
US 6,139,969 · App. 07/981,706

Reactive sputtering of silicon and transition metal

Inventor: James J. Finley
Patented Case View Patent ↗
Granted: Oct 31, 2000 Filed: Nov 25, 1992
Inventor
James J. Finley
Assignee (at issue)
PPG Industries Ohio, Inc.

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Quick Facts
Patent No.
US 6,139,969
App. No.
07/981,706
Filed
1992-11-25
Granted
2000-10-31
Kind
A