Granted Patent
Utility
US 6,139,994 · App. 09/344,251
Use of intersecting subresolution features for microlithography
Inventors:
Doug Broeke, Fung Bor Chen
Patented Case
View Patent ↗
Granted: Oct 31, 2000
Filed: Jun 25, 1999
Inventors
Doug Broeke
Fung Bor Chen
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.