Granted Patent
Utility
US 6,140,211 · App. 09/122,276
Method for recycling wafers used for quality assurance testing of integrated circuit fabrication equipment
Inventors:
Arun K. Nanda, Jose Omar Rodriguez
Patented Case
View Patent ↗
Granted: Oct 31, 2000
Filed: Jul 24, 1998
Inventors
Arun K. Nanda
Jose Omar Rodriguez
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.