Granted Patent
Utility
US 6,140,744 · App. 09/057,182
Wafer cleaning system
Inventor:
Mario E. Bran
Patented Case
View Patent ↗
Granted: Oct 31, 2000
Filed: Apr 8, 1998
Inventor
Mario E. Bran
Assignee (at issue)
Verteq, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.