Granted Patent
Utility
US 6,142,164 · App. 09/037,390
Method and apparatus for removing leaking gas in an integrated gas panel system
Inventors:
Bruce C. Wier, Akira Muraoka, Charles Lokey
Patented Case
View Patent ↗
Granted: Nov 7, 2000
Filed: Mar 9, 1998
Inventors
Bruce C. Wier
Akira Muraoka
Charles Lokey
Assignee (at issue)
Ultra Clean Technology Systems and Services Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.