Granted Patent
Utility
US 6,143,079 · App. 09/195,793
Compact process chamber for improved process uniformity
Inventor:
Michael Halpin
Patented Case
View Patent ↗
Granted: Nov 7, 2000
Filed: Nov 19, 1998
Inventor
Michael Halpin
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.