Granted Patent
Utility
US 6,143,608 · App. 09/283,308
Barrier layer decreases nitrogen contamination of peripheral gate regions during tunnel oxide nitridation
Inventors:
Yue-Song He, Masaaki Higashitani, Hao Fang, Narbeh Derhacobian, Bill Douglas Cox, Kent Kuohua Chang, Kelwin Ko, Maria Chow-Chan
Patented Case
View Patent ↗
Granted: Nov 7, 2000
Filed: Mar 31, 1999
Inventors
Yue-Song He
Masaaki Higashitani
Hao Fang
Narbeh Derhacobian
Bill Douglas Cox
Kent Kuohua Chang
Kelwin Ko
Maria Chow-Chan
Assignees (at issue)
Advanced Micro Devices, Inc.
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.