Granted Patent
Utility
US 6,143,652 · App. 09/063,672
Method for forming metallic layer using inspected mask
Inventor:
Chia-Chieh Yu
Patented Case
View Patent ↗
Granted: Nov 7, 2000
Filed: Apr 21, 1998
Inventor
Chia-Chieh Yu
Assignee (at issue)
United Semiconductor Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.