Granted Patent
Utility
US 6,143,665 · App. 08/998,769
Method of etching
Inventor:
Chi-Kuo Hsieh
Patented Case
View Patent ↗
Granted: Nov 7, 2000
Filed: Dec 29, 1997
Inventor
Chi-Kuo Hsieh
Assignee (at issue)
United Semiconductor Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.