Granted Patent
Utility
US 6,145,345 · App. 09/092,380
Modified chemical vapor deposition using independently controlled thermal sources
Inventors:
Stanley F. Marszalek, Katherine Theresa Nelson, Kenneth L. Walker, Kim Willard Womack, Man F. Yan
Patented Case
View Patent ↗
Granted: Nov 14, 2000
Filed: Jun 5, 1998
Inventors
Stanley F. Marszalek
Katherine Theresa Nelson
Kenneth L. Walker
Kim Willard Womack
Man F. Yan
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.