Granted Patent
Utility
US 6,146,468 · App. 09/263,336
Semiconductor wafer treatment
Inventors:
Paul William Dryer, Richard Scott Tirendi, James Bradley Sundin
Patented Case
View Patent ↗
Granted: Nov 14, 2000
Filed: Mar 5, 1999
Inventors
Paul William Dryer
Richard Scott Tirendi
James Bradley Sundin
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.