Granted Patent
Utility
US 6,146,509 · App. 09/330,883
Inverted field circular magnetron sputtering device
Inventor:
Steven Aragon
Patented Case
View Patent ↗
Granted: Nov 14, 2000
Filed: Jun 11, 1999
Inventor
Steven Aragon
Assignee (at issue)
Scivac
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.