IP Library Granted Patent US 6,146,797
Granted Patent Utility
US 6,146,797 · App. 09/204,894

Focused ion beam lithography method with sample inspection through oblique angle tilt

Inventor: Toshiaki Fujii
Patented Case View Patent ↗
Granted: Nov 14, 2000 Filed: Dec 3, 1998
Inventor
Toshiaki Fujii
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 6,146,797
App. No.
09/204,894
Filed
1998-12-03
Granted
2000-11-14
Kind
A