Granted Patent
Utility
US 6,146,917 · App. 08/810,387
Fabrication method for encapsulated micromachined structures
Inventors:
Xia Zhang, David G. McIntyre, William C. Tang
Patented Case
View Patent ↗
Granted: Nov 14, 2000
Filed: Mar 3, 1997
Inventors
Xia Zhang
David G. McIntyre
William C. Tang
Assignee (at issue)
Ford Motor Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.