Granted Patent
Utility
US 6,146,964 · App. 09/094,488
Method of manufacturing a semiconductor device having a fin type capacitor electrode
Inventor:
Shinichi Hakamada
Patented Case
View Patent ↗
Granted: Nov 14, 2000
Filed: Jun 10, 1998
Inventor
Shinichi Hakamada
Assignee (at issue)
OKI ELECTRIC INDUSTRY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.