Granted Patent
Utility
US 6,146,970 · App. 09/084,280
Capped shallow trench isolation and method of formation
Inventors:
Keith E. Witek, Mike Chen, Stephen S. Poon
Patented Case
View Patent ↗
Granted: Nov 14, 2000
Filed: May 26, 1998
Inventors
Keith E. Witek
Mike Chen
Stephen S. Poon
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.