Granted Patent
Utility
US 6,147,177 · App. 09/253,497
Polycyclic resist compositions with increased etch resistance
Inventors:
Saikumar Jayaraman, Brian L. Goodall, Larry F. Rhodes, Robert A. Shick, Richard Vicari, Robert David Allen, Juliann Opitz, Ratnam Sooriyakumaran, Thomas I. Wallow
Patented Case
View Patent ↗
Granted: Nov 14, 2000
Filed: Feb 19, 1999
Inventors
Saikumar Jayaraman
Brian L. Goodall
Larry F. Rhodes
Robert A. Shick
Richard Vicari
Robert David Allen
Juliann Opitz
Ratnam Sooriyakumaran
Thomas I. Wallow
Assignees (at issue)
B. F. Goodrich Company
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.