Granted Patent
Utility
US 6,147,321 · App. 09/128,387
Configuration for the automatic inscription or reinscription of wafers
Inventors:
Eckhard Marx, Detlef Gerhard, Jens Müller
Patented Case
View Patent ↗
Granted: Nov 14, 2000
Filed: Aug 3, 1998
Inventors
Eckhard Marx
Detlef Gerhard
Jens Müller
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.