Granted Patent
Utility
US 6,147,413 · App. 08/908,613
Mask repattern process
Inventor:
Warren M. Farnworth
Patented Case
View Patent ↗
Granted: Nov 14, 2000
Filed: Aug 7, 1997
Inventor
Warren M. Farnworth
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.